Planar faults (PF) are an important manifestation of high-temperature plastic deformation of superalloys. At elevated temperatures, local segregation and depletion of alloying elements at the PFs through diffusion is facilitated, and often a prerequisite for PF formation and lengthening. The local change in composition affords a reduction in the energetical cost of fault creation and can therefore have a direct influence on the mechanical properties of the material. To better understand the dynamics of this segregation process, we investigate how the segregation of different elements changes at PFs when the sample is annealed without load, at various temperatures, after the initial high-temperature deformation.