MSE 2024
Highlight Lecture
24.09.2024
Increasing the cooling capacity of a magnetron sputter source using additively manufactured porous copper structures
SG

Samira Gruber (M.Sc.)

Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS

Gruber, S. (Speaker)¹; Kieser, J.A.¹; Stepien, L.¹; Lopez, E.¹; Brueckner, F.¹; Leyens, C.¹; Schumpa, T.²; Top, M.²
¹Fraunhofer Institute for Material and Beam Technology IWS Dresden; ²Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP Dresden
Vorschau
29 Min. Untertitel (CC)

Open porous, flow-through structures have a high surface-to-volume ratio and therefore a high heat transfer between the structure and the fluid. In addition, copper and copper alloys have excellent thermal conductivity and are therefore suitable for applications that require a high cooling capacity (e.g. magnetron sputtering). Selective laser powder bed fusion (PBF LB/M) offers the possibility of producing highly complex internal structures from copper and copper alloys and thus increasing the cooling capacity. This contribution shows improved heat conduction of open-pored cooling structures for magnetron sputtering applications. For this purpose, lattice structures with targeted porosity were produced and characterized using PBF LB/M made of pure copper and the hardenable alloy CuCr1Zr. The geometric accuracy of the lattice structures was evaluated by destructive and non-destructive testing and increased by adapting the process parameters. The heat transfer of selected porous structures was determined experimentally

Abstract

Abstract

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