This work demonstrates a procedural approach for depth profile measurement and evaluation via LA-ICP-MS as 2D cross sections. Conventional LA-ICP-MS depth profile measurement approaches (such as measuring single or multiple spots or lines) provide insight only into the layered structure at specific small sample locations or an average layer composition. In contrast, the proposed approach—using single pulse-resolved line scan measurements followed by evaluation as an elemental map—allows for easy recognition of lateral variations in the depth profile along one dimension.