Carl Zeiss Microscopy GmbH
The authors present a new concept: a high-resolution field-emission scanning electron microscope (FE-SEM) with integrated fs-laser (LaserSEM). This cost-effective solution combines the imaging and analytical performance of a high-resolution FE-SEM with fs-laser processing for massive material ablation and fast site-specific sample preparation in micro/mesoscale. The seamless integration of SEM and fs-laser gives researchers in academic or industry R&D labs direct and simultaneous access to high-resolution imaging and all analytical capabilities configurable with an FE-SEM, such as EDS or EBSD. No matter, if the researchers are interested in engineering, energy, or nanomaterials applications. The LaserSEM accelerates workflows such as cutting a pillar or an array of pillars for micromechanical testing, X-ray tomography (XRM) samples, or even multi-modal workflows e.g. correlative experiments between XRM and SEM.
Abstract
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