There is an increasing demand for transparent conducting metal oxide thin films, as they are an essential element in a variety of today’s everyday electronic products such as displays, organic light-emitting diodes, and solar cells. To date, mainly indium tin oxide (ITO) has been used for such purposes due to its high conductivity and transparency, but indium is rare and depleting worldwide which urges the search for cheap and available alternatives. Such a promising alternative is aluminum-doped zinc oxide (AZO), as aluminum and zinc are widely available. While conducting thin films are usually manufactured through vapor-based or solution-based methods resulting in compact thin films, particle-based thin films have not been investigated in-depth although they can be fabricated via simple printing processes and offer an interesting approach for adjusting the properties of the thin film through tuning the properties of the synthesized particles which act as building blocks. Furthermore, the use of well-defined particle aggregates can also serve as hierarchical superstructures in the formed thin films which opens the door to thin films with various internal structures and varying porosity. In this work, a non-aqueous synthesis route in benzyl alcohol is adopted to obtain different AZO nanoparticles varying from isotropic to anisotropic nanoparticles which are also further organized in larger well-defined aggregate structures through tuning of different process synthesis parameters. These AZO nanostructures are then further processed yielding thin films of various degrees of porosity which could be beneficial for different applications. Drop-casting and spin-coating deposition techniques could be successfully implemented to obtain highly homogenous particle-based AZO thin films with tunable film thickness depending on the particle concentration in the ethanolic particle dispersion used. Grazing-Incidence Small-Angle X-ray Scattering (GISAXS) was used as analytical technique to reveal the internal structure of the resulting thin films.