Understanding of mechanical and anti-oxidizing properties of superalloys and their subsystems is of importance. Therefore, thin film materials libraries of the superalloy subsystems Ni-Co-Al, Co-Al-Cr-(W), Co-Ti-W and Cr-Co-Ni were prepared on 100 mm diameter substrates by combinatorial magnetron sputtering. The libraries were analyzed by high-throughput characterization experiments, such as X-ray diffraction, energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy and resistance measurements regarding their oxidation and phase formation behaviour.

These experiments show that high-throughput experiments on thin film materials libraries lead to useful insights also applicable to bulk materials. Moreover, the experiments yield extensive, well-structured data that can be used for machine learning applications on a path towards automated experiments. The investigation results will be presented along with the applied methodology for fast combinatorial materials analyses. Advantages of using high-throughput thin film investigation methods to complement conventional bulk preparation and characterization techniques will be discussed.