Leibniz IFW Dresden
Since more than 50 years Glow Discharge Optical Emission Spectrometry (GDOES) proved to be a reliable method for multi-elemental analysis of solid samples. In short time, GDOES delivers very valuable information about nanometre thick layers at the surface up to the bulk region in more than 100 µm depth. This led to its acceptance and wide use in industry and R&D today. Several instrumental developments during the recent years extended the usable samples, possible applications and improved the information amount and quality.
1. With Pulsed Glow Discharges (PGD) e.g. heat sensitive photovoltaic and battery samples may be analysed. Now, for the first time CMOS detectors are applied in GDOES, which allow synchronized measurements of PGD. The integration time ranges from 150 µs – 700 µs and detection may be synchronized with pulse generation in 1 µs steps.
2. The use of Universal Sample Units (USU) and Sample Transfer Vessels (STV) is essential to avoid contamination of samples containing elements like Lithium and Sodium.
3. Autosamplers reduce not only the manpower needed for the operation of the GDOES instrument, but also improve reproducibility and accuracy. The samples may be positioned on the sputtering source with micrometer accuracy, supporting e.g. homogeneity measurements.
4. Currently, the depth calculation is based on the emission yield (EY) concept in combination with a model for the density of the solid sample. Several Depth Measuring Systems (DMS) exist and help to quantify the depth axis independently of the measured composition of the sample.
Abstract
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