The material properties of technological materials are resulting from the stoichiometry and many applications use variations in composition to tune the final properties. A method well suited for the analysis of such materials is LA-ICP-MS, providing high spatial resolution and sensitivity. However, due to matrix effects, quantification often remains challenging. 

This work uses a novel quantification approach with the help of monodisperse microdroplets to determine the stoichiometry of ceramic thin film materials used for solid oxide fuel cells.