3D tomography is a commonly used tool on FIB systems to analyse material characteristics in multiple dimensions. Hence the method is mainly used utilizing ion beams, the volume being characterized is limited by the maximum removal rate of the used beam. If a material characteristic e.g. grain size requires a large volume needs to be investigated for a quantitative analysis. This issue can be overcome by utilizing laser beams as the preparation technique for cross-sectioning. As the removal rate can be much higher compared to ion beams, a large volume/cross-sectional area is accessible.

In this work a 3D tomography run is executed in a copper sample utilizing only the laser beam for slicing. Despite the occurrence of laser induced periodic surface structures, which increase the surface roughness of each slice, the quality of each slice surface is still sufficient to execute EBSD and EDS scans. Therefore, a three dimensional analysis of microstructure, elemental distribution and crystallographic orientation on large features is accessed.