Currently, manufacturing processes of metal pieces in oxygen-free conditions are under investigation to enable completely new process strategies. These conditions place special demands on tribological systems between the work piece and the tool. This research work shows the concept and fabrication of functionalized flat indenter tips with a diameter of 10 to 20 µm and a height between 60 and 80 µm to investigate the changes of the adhesion tendency of different materials without disturbing macroscopic and microscopic effects by generating a specific surface pressure between the deoxidized surface of the tip and the work piece in an silane-doped argon atmosphere with and without relative motion.