The production of precise periodic micro and nanostructures is an area with a great potential for the future industrial fabrication of functional surfaces which may attain innovative surface properties including friction reduction, increased adhesion, wettability modification or antibacterial and cell-growth properties. Despite a list of attractive applications of functional surfaces and demonstrated capability of lasers to produce them, the productivity of laser micro and nanostructuring is still low with respect to many industry standards. Rapid development in the field of high power ultrashort laser systems [1] is a promising step for fast rapid large-scale surface micro and nanostructuring. However, methods that can efficiently use the full power of these laser systems for precise fabrication near the ablation threshold are still lacking. One of the most promising solutions for rapid large-scale laser micro and nanomachining is multi-beam processing and beam shaping. By utilizing these techniques, the incident beam can be split into a matrix of sub-beams or modified into the desired shape.

In this work, we introduce the most promising techniques utilized for rapid surface functionalization which includes direct laser interference patterning, dynamic beam shaping with spatial light modulator and multi-beam processing with diffractive optical elements reaching up to 40 401 beams and productivity over 1910 cm2/min.