Thin film ablation of indium tin oxide (ITO), one of the most common transparent conductive oxides (TCOs), using ultrashort pulsed laser radiation is investigated. The influence of numerical aperture (NA), pulse duration, spatial and temporal pulse spacing on particle re-deposition and ablation groove shape is studied for both single- and multi-beam processing. The experiments show a significant effect of NA and spatial pulse overlap on the amount, size and local distribution of ablation particles on the sample surface.