Atomare Schichtabscheidung

Deposition (Abscheidung)

Atomare Schichtabscheidung

Atomare Schichtabscheidung (ALD) ist ein dünnfilmtechnologisches Verfahren, bei dem durch sukzessive, selbstlimitierende Reaktionen atomar präzise Schichten erzeugt werden. Dieses Verfahren spielt eine wichtige Rolle bei der Herstellung von Halbleitern, Sensoren und nanostrukturierten Oberflächen.

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Nielsch, K. (Speaker)¹

6th - International Conference on Intelligent Materials - Networked Matter - InMAT 2025

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Andersen, O. (Speaker)¹; Kostmann, C.¹; Lisec, T.²; Gojdka, B.²; Weißgärber, T.¹

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Namdar, H. (Speaker)¹; Laidani, N.²; Micheli, V.²; Testi, M.²; Ataollahi, N.³; Erol, R.⁴; Gamba, G.⁴

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Jiménez, A. (Speaker)¹; Pagnan Furlan, K.¹

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Highlight Lecture

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