Demonstrator
Interactive AI-Powered Plasma Spectra Prediction in Sputtering Processes
Perschewski, J.-O. (Speaker)¹; Barth, S.²; Bartzsch, H.²; Glauer, M.¹; Kupsch, C.³; Käpplinger, C.⁴; Leipner, E.³; Neidhardt, J.²; Nestler, M.⁵; Neuhaus, F.¹; Schütte, T.⁶; Urbach, J.-P.⁶
MaterialDigital General Assembly 2025
