FEMS EUROMAT 2023
Poster
Laser-microstructuring of FTO thin films for photovoltaics: influence of pulse duration
MS

Dr. Marcos Soldera

Technische Universität Dresden

Heffner, H.¹; Soldera, M. (Speaker)²; Lasagni, A.F.³
¹TU Dresden; ²Dresden; ³TU Dresden

Transparent Conductive Oxides (TCOs) are used in solar cells for extracting photogenerated carriers and for allowing sunlight to reach the photoactive material. Therefore, controlling the electrical and optical properties of these films is crucial for the optimization of the device performance. One strategy to tune the optoelectronic properties of TCOs is to modify the surface morphology by micropatterning. Particularly, Direct Laser Interference Patterning (DLIP) is a convenient method to produce periodic microtextures on the surface of TCOs by overlapping laser pulses at a controlled incidence angle. In this study, the topography and optical and electrical properties of Fluorine-doped Tin Oxide (FTO) are modified by DLIP applying ultrashort laser pulses. To investigate the influence of the pulse duration on the surface quality and the resulting properties, pulse durations ranging from 280 fs to 10 ps were applied. The surface topography was characterized by Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM), whereas the optical properties were measured by photospectroscopy methods and the electrical resistance was measured with the four-point probe technique. In general, well defined line-like structures were observed for all pulse durations with structure heights depending mostly on the used laser fluence. A strong dependence of the pulse duration on the threshold fluence was observed. Namely a threshold fluence ranging from 0.80 mJ/cm2 for a pulse duration of 280 fs to 1.5 J/cm2 for a pulse duration of 1 ps was measured for a wavelength of 515 nm, whereas the threshold fluence increased from 0.41 to 1.10 J/cm2 as the pulse duration increased from 0.9 ps to 10 ps at a laser wavelength of 1030 nm. The optoelectronic properties were strongly modified, obtaining significant increases in the diffuse transmittance in the visible and near infrared spectrum. Although the electrical sheet resistance tended to increase with the laser fluence, such variations dependend strongly whether the resistance was measure parallel or across the microgrooves. The results of this work thus show fundamental insights into the patterning of FTO thin films using ultrashort laser pulses and DLIP is demonstrated as a suitable method for the functionalization of this material for applications in optoelectronic devices. 

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