This paper introduces a method for measuring opto-thermal parameters with sub-micrometer precision using an atomic force microscope (AFM) combined with an additional laser heating to generate thermal waves. Thermal waves can be measured in various ways as shown by earlier photothermal techniques [1]. Using an AFM as a temperature probe allows the assessment of thermal properties in the sub-micron range through the sharp tip on the probe, resulting in small areas of interaction within the sample [2]. Scanning Thermal Microscopy (SThM) is commonly employed to measure the temperature on the sample, the phase lag and amplitude of the thermal waves. An alternative method explored in this study involves using a basic AFM probe to gauge the thermoelastic deformation of the sample surface induced by temperature variations in the thermal waves. Analogous to photothermal reflectance techniques, the phase lag, and consequently, the thermal diffusivity can be measured using either spatial or frequency dependency [3-4]. The paper delves into the theoretical aspects and the application of the atomic force microscope. It outlines the necessary experimental enhancements for utilizing the AFM as a thermal microscope, accompanied by theoretical simulations and initial experimental findings.