Focused Ion Beam (FIB) techniques have gained widespread use for preparing samples at the micro- and nanoscale and other in-situ measurements. Ensuring minimal perturbation of the investigated structures is pivotal for maintaining the integrity of research endeavors. The uncontrolled bombardment of minute structures with high-energy ions can significantly influence their properties and microstructure. Tailoring milling parameters to suit specific materials, scales, and research objectives can markedly enhance the fidelity of future investigations. While investigations into ion implantation during FIB sample preparation have been pursued with microscopy [1], coherent X-ray diffraction [2], and theoretical simulations such as SRIM [3], a comprehensive delineation of the process across diverse materials remains a global challenge. This work investigates the structural, chemical, and compositional alterations induced by diverse FIB parameters on metallic micropillars, thus contributing to a holistic understanding of the FIB preparation process.

We used a non-destructive synchrotron for nano diffraction in combination with X-ray fluorescence to examine ion implantation and re-deposition in metallic micropillars prepared using Xe+ ions energies of 10 and 30 keV. Our results show that higher ion energy resulted in more ions deposited in the milled material. The redeposited ions have altered the lattice structure of the metal, causing deformation in regions with higher concentrations along certain (hkl) planes [4].

References

[1] J. Liu, R. Niu, J. Gu, M. Cabral, M. Song, X. Liao, Scientific Reports, 10(1), 1–8 (2020)

[2] F. Hofmann, E. Tarleton, R. Harder, N. Phillips, P. Ma, J. Clark, I. Robinson, B. Abbey, W. Liu, C. Beck, Scientific Reports, 7, 1–10, (2017)

[3] W. Sussex, Applied Surface Science 416, 86–95 (2017).

[4] K. Singh, S. S. Rout, C. Krywka, & A. Davydok, (2023) Materials, 16(22), 7220.