During operation the LINAC4 RFQ (Radio-Frequency-Quadrupole) is exposed to high electric fields which can lead to vacuum breakdown. It is also subject to beam loss that can cause surface modification, including blistering, which can result in reduced electric field handling and an increased breakdown rate. An experimental study has been made to identify materials with high electric field capability and robustness to low-energy irradiation. In this paper we briefly discuss the selection criteria and we analyze these materials investigating their metallurgical properties using advanced microscopic techniques such as Scanning Electron Microscope, Electron Back Scattered Diffraction, Energy-dispersive X-ray Spectroscopy and conventional optical microscopy. These allow to observe and characterize the different materials on a micro and a nano-scale, allowing us to compare results before and after irradiation and breakdown testing