55. Metallographie-Tagung 2021 - Materialographie
Vortrag
29.09.2021
3D Nanoscale Compositional Analysis – Advances in Atom Probe Tomography
RC

Dr. Rene Chemnitzer

CAMECA / Ametek

Chemnitzer, R. (V)¹; Bunton, J.¹; Clifton, P.¹; Geiser, B.¹; Larson, D.¹; Lenz, D.¹; Martin, I.¹; Reinhard, D.¹; Ulfig, R.¹
¹CAMECA / Ametek
Vorschau
22 Min. Untertitel (CC)

The continued adoption of atom probe tomography into new applications is due to its unique ability to achieve both sub-nanometer spatial resolution and to detect all elements at up to 80% detection efficiency as well as the continued improvements in the features and performance of the hardware and software. Here we will discuss efforts towards improving mass resolving power (MRP), Field of view (FOV) and laser illumination. It is desirable for an atom probe microscope to have a combination of high MRP with a wide FOV. However, these two metrics are at odds with each other, from a design perspective, due to the high spread in flight-time variations (different flight paths) across the FOV of a large detector. Some efforts to overcome this difficulty employ reflectron energy compensating based solutions [1] while others use a straight flight path design. This work presents our efforts to utilize novel patented technology [2], to produce an increased FOV in the atom probe, while maintaining very good MRP. Exposure to a single focused-laser-beam may lead to a non-hemispherical (asymmetrical) tip shape [3], we are currently testing a system to irradiate an atom probe specimen from two sides in a thermally coincident manner. Making use of an algorithm designed to fit a high-order polynomial equation to each point across the surface of a specimen [4], the radii for each of the specimens are quantified. Using two beams results in a decrease of ~5X in the standard deviation as a percentage of the mean.


Abstract

Abstract

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