Lecture
09.06.2022
Ultra-short laser micro-machining by spatially shaped ps- and fs-pulses for depth-selective $\mu$-TLM resistivity test structures of sputter-deposited metal/oxide/metal/Si-substrate contact layers
Krause, S. (Speaker)¹; Fett, B.²; Hagendorf, C.³; Kabakli, Ö.⁴; Lange, S.³; Miclea, P.³; Newcomb-Hall, Z.⁴; Vaghasiya, H.⁵
Laser Precision Microfabrication (LPM) 2022