We present an original safe-by-design process for the synthesis of nanostructured films composed of nanoparticles embedded in a matrix of a different material. This versatile single step process operates by combining jets of nanoparticles with classical magnetron sputtering. The main advantage of the technique is the possibility to choose independently the chemical nature of nanoparticles and the one of the matrix. 

The production of divergent jets of nanoparticles is successfully achieved by the expansion of a carrier gas containing the particles through an aerodynamic lens system. The adjustment of the acceleration nozzle diameter in the aerodynamic lens controls the divergence of nanoparticle jets, increasing dramatically the covered surface area. The aerodynamic lens is then an efficient way to transport the nanoparticles from any kind of source at atmospheric pressure to the deposition chamber at a pressure that is compatible with magnetron sputtering. The versatility of the process is demonstrated by embedding metal nanoparticles into a ceramic matrix and vice versa. The concentration of the nanoparticles in the coatings is easily varied by adjusting the concentration in the nanoparticles sources, or by adjusting the matrix deposition rate. Due to the simultaneous deposition of nanoparticles and matrix, the morphology of the films, and consequently their porosity and roughness, are closely related to the density of nanoparticles.

The use of several aerodynamic lens arrays combined with smart masking demonstrates the ability for coating on large surface area (40 cm2) substrates. These extended possibilities for developing new types of nanocomposites on any type of substrate and on large surface areas at low temperatures could be of strategic interest for various applications requiring specific functional properties.