The ion-beam sputtering deposition (IBSD) is a method based on physical etching of a target with consequent condensation of this material on substrates. A large sputtering area with a flexible energy calibration provides conditions for a wide variation of functional thin-films design. In this work, we report developing of several multi-layered coatings for different investigations at Megascience facilities: i) X-ray standing wave (XSW) generators, ii) the compact large-energy bandwidth monochromator, and iii) magnetic contrast layers (MCL) for the polarised neutron reflectometry (PNR). The IBSD in all cases provided smooth and uniform amorphous coatings which meet requirements of X-ray and neutron optics. Complementary laboratory investigations by AFM and XRR methods approved sub-nm roughness (up to 0.2 nm) and non-gradient morphology of individual layers and continuos surface in obtained structures.

In the first case, we conducted XSW experiments on evaluation of chemical composition of the EuMn nanoparticles produced by a bacterial Dps (from E. coli) using AlOx/CuOx Bragg reflectors. In another research, we achieved bandwidth of 4±0.2% in the energy range 7-16 keV maintaining reflectivity of 23-60% using Mo/Si multilayer as the monochromator. Quality of the achieved beam was evaluated in experiments with multicomponent catalytic systems containing Co(tpyOH) or FeTPPCl. And finally, a set of 50*50 mm substrates covered by Fe/SiO2 bilayers were tested in several PNR experiments in presence of 10 mT magnetic field for switching between R+ and R- polarisation- all these samples demonstrated significant SLD variation of MCL.