In recent years, the interest in ceramic materials has been growing rapidly due to their unique properties, including high hardness, high strength, chemical stability, biocompatibility and high-temperature performance. Multiphoton polymerization combined with calcination/pyrolysis has been proved to be a powerful tool for the fabrication of fully 3D glass-ceramic micro/nano-objects for mentioned applications.

Therefore, in this work, the focus was on the study of an advanced method for transforming silicon and zirconium metalorganic 3D nano/micro-structures into pure crystalline 3D objects by combining laser multi-photon lithography and calcination. We synthesized a series of organic-inorganic polymer precursors via sol-gel method varying the molar ratio of silicon (Si) and zirconium (Zr) and investigated the prospects of 3D formation and calcination of these materials. The study shows that structures retain their shape without any distortion. Furthermore, calcination provides a route for the continuous size control and formation of a variety of phase transformations for free-form nano-/micro-objects.